abstract:Rigorous coupled-wave analysis (RCWA) is a semi-analytical method in computational electromagnetics that is most typically applied to solve scattering from periodic dielectric structures. It is a Fourier-space method so devices and fields are represented as a sum of spatial harmonics.
The diffractiveefficiency of thegrating is computedby usingrigorouscoupled-waveanalysis (RCWA). The propertyofpolarization of the grating is also discussed.