金属三维微结构加工技术的研究 关键词：MEMS；微加工；反应离子刻蚀；电镀；金属微结构 [gap=1239]Key Words：MEMS；Micmfabricafion；RIE Etching；Electroplating；Metal Micro Structure
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By optimizing DRIE parameters and RIE etching the trenches' opening, the ideal trench profile is obtained to ensure that the trenches are fully refilled without voids.
采用经过参数优化的DRIE刻蚀深硅槽，并用反应离子刻蚀(RIE)对深槽开口形状进行修正，制造了具有理想侧壁形状的深槽，利于介质的完全填充，避免产生空洞。
Mechanism of dry etching damage and main causes for RIE induced - damage are investigated with RIE technique by utilizing PIN photodiodes.
采用rie法，利用PIN光电二极管，研究了干法腐蚀损伤机理及引起损伤的主要因素。
Yak hairs were treated by the microwave electron cy cl otron resonance plasma reactive ion etching(ECR-RIE) equipment to improve its property of weave.
采用微波电子回旋共振等离子体反应离子刻蚀（E CR-R IE）装置对牦牛毛纤维进行表面改性，从而改善牦牛毛的可纺性。
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