专业化学类翻译求助，急！高分悬赏！_百度知道 Keywords: Rf-sputtering; BaTiO3 film; Ellipsometry; Optical properties; Microstructure [gap=449]关键词：射频溅射;钛酸钡薄膜;椭偏;光学性质;微观结构
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rf sputtering 射频溅射 ; 射频磁控溅射
RF Magnetron Sputtering 射频磁控溅射 ; 射频磁控溅射法
RF sputtering equipment 射频溅射设备
RF Sputtering InSb Film 溅射InSb薄膜
magnetron rf sputtering system 磁控射频溅射
reactive RF magnetron sputtering 反应rf磁控溅射
The reaction parameters such as the parameters of RF-sputtering, the category of the chelation and the environment of the solution are investigated.
研究溅射参数、络合剂与反应溶液环境等反应参数对制备过程的影响。
Dielectric breakdown of BST thin films prepared by RF sputtering is studied in this paper.
采用射频溅射制备BST薄膜，研究了薄膜的介电击穿特性。
The results show that compared with parallel electrode method, RF resonance method has advantages such as shorter extraction time, lower collision loss and sputtering loss and higher collection ratio;
模拟结果表明，RF共振法与平行板静电场法相比，引出时间较短，碰撞损失和溅射损失较低，收集率较高；
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