resistance heading furnace
... resist thickness uniformity抗蚀剂膜厚均质性 resistance heading furnace电阻加热炉 resistance heating element电阻加热元件 ...
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If the heading element is much damaged or its resistance value increases too much and cannot reach the furnace temperature, it is better to replace the heating elements with mew ones.
若元件损坏较多或阻值增长过大，无法达到所需炉温时最好全部更换新元件。
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