argon remote-plasma 远程氩等离子体
remote plasma polymerization 间接等离子体聚合
remote argon plasma 远程氩等离子体
remote oxygen plasma 远程氧等离子体
Remote plasma was used in the modification of surface functional group of activated carbon fiber (ACF).
采用远程等离子体方法对活性炭纤维（ACF）进行表面功能化改性。
The dielectric barrier discharge and remote plasma treatment have been improved to accomplish industrial application and obtain preferable result of plasma surface modification.
介质阻挡放电和远等离子体处理是实现工业化和获得更好的等离子体表面改性的新方法。
It comprises transport of activated gas from a remote plasma source to an area in the chamber in a uniform way through at least two injection points on equivalent paths for the reactive species.
所述方法包括通过至少两个注射点且在用于反应性物质的等同路径上以均匀的方式将被活化的气体从远程等离子体源输送至所述室中的区域。
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