abstract:Reflection high-energy electron diffraction (RHEED) is a technique used to characterize the surface of crystalline materials. RHEED systems gather information only from the surface layer of the sample, which distinguishes RHEED from other materials characterization methods that also rely on diffraction of high-energy electrons.
Surfacedamage caused by cutting on Si, InSb, HgCdTe has been studied by ReflectionHigh Energy ElectronDiffraction (RHEED) afterstep-etching thesamples.