Sine digital grating (computer generated grating) is acted as reference grating.
参考栅采用计算机绘制的正弦型数字栅。
Grating is placed in image space of objective lens, and used as the shearing part. Light wave from reference object and measured object interfered at the image space.
它在成像物镜的像方空间放置光栅，利用光栅的衍射原理，使来自参考物和被测物的光波在像面发生干涉。
It's unnecessary to collect deformed grating images of object reference plane, which reduces operation steps and takes no solution for the phase of object reference plane.
由于不需另外采集实物参考面变形光栅图像，不仅减少了实物参考面的采集步骤，而且不需要对实物参考面相位进行求解。
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