x ray lithography X射线光刻
x ray lithography x 射线光刻技术
X-ray lithography X射线光刻 ; X光光刻
soft X-ray lithography 软X射线光刻
x - ray lithography x射线光刻
ray lithography mask 射线光刻掩膜
x-ray lithography mask x射线光刻掩模
x-ray lithography system x射线光刻机
X-ray deep lithography X光深层光刻
soft x ray projection lithography 软x射线投影光刻
The fabrication procedure of the mask and results of the deep X ray lithography are given.
给出了该掩模设计制作工艺过程及深x射线光刻结果。
The design and fabrication of high aspect-ratio hard X-ray zone plates by X-ray lithography are studied.
对利用X射线光刻制作大高宽比硬x射线波带片的设计和制作工艺进行了研究。
The manufacture of high-line-density X-ray transmission gratings for X-ray spectroscopy by using electron beam lithography and X-ray lithography was reported.
针对X射线透射光栅摄谱仪中的高线密度光栅，研究了采用电子束曝光和X射线曝光技术结合制作高线密度X射线透射光栅的工艺技术。
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