Using a number of different near and far projection parameters.
使用许多不同的远近投影参数。
The specific parameters of main optical system are deduced from the requirement of pattern transfer for the projection aligner. The limit of these parameters is discussed.
本文从投影光刻机的图形传递要求出发，导出投影光刻机各主要光学系统的具体要求，并讨论这些参数确定的局限性。
The computer simulation of the distribution of the imaging space illumination under different parameters gives a straightforward proof of the imaging principle applied in this projection system.
经过模拟分析在不同参数条件下投影系统的空间光照度分布情况，直观地验证了上述投影系统的成像理论。
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