... projection aligner投影对准曝光器 projection optical system投影光学系统 protrusion dam bar堵住杆突起部分，纬之突出部分 ...
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film projection optical system [电影] 放映光学系统
optical projection system [光] 光学投影系统 ; 光学投影装置 ; [光] 投影系统
teletype optical projection system [光] 电传光学投影系统 ; 电传打字光投影系统
pantograph optical projection system 光学缩图投影系统 ; 缩图光学投影系统
digital optical projection system 都柏斯系统
DOPS Digital Optical Projection System 数字式光学投影系统
helmet-mounted optical projection system 设在光学投影系统
The laser direct writing(LDW) system SVGLDW 04 with a projection optical system and a spatial light modulator(LCD-SLM) can expose a reduction pattern directly on a photoresist plate.
通过双远心成像光路，激光直写（LDW）系统SVG-LDW 04把液晶空间光调制器（LCD-SLM）上的光斑直接成像在光刻胶板上，得到高质量的光斑图形。
The specific parameters of main optical system are deduced from the requirement of pattern transfer for the projection aligner. The limit of these parameters is discussed.
本文从投影光刻机的图形传递要求出发，导出投影光刻机各主要光学系统的具体要求，并讨论这些参数确定的局限性。
Differing from the traditional optical measuring method, the measuring system USES two CCD cameras to record projection grating, thus reduces errors and improves measuring accuracy.
与传统的光学测量方法不同，测量系统采用两个CCD相机记录投影光栅，减小了测量误差，提高了测量精度。
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