... 投影几何学：projective geometry 投影光刻：Projection lithography 投影光度测量法：projection photometry ...
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optical projection lithography 光学投影蚀刻
electron projection lithography 电子投影金属版印刷 ; 电子束投影光刻 ; 电子投影平版印刷 ; 电子发射平版印刷
ion projection lithography 离子投影金属版印刷 ; 离子投影光刻 ; 离子束投影光刻技术 ; 子束投影式微影
ion-beam projection lithography 离子束投影光刻
ion projection lithography machine 离子投影光刻机
Electron Beam Projection Lithography 投射式电子束微影术 ; 电子束微影技术
soft x-ray projection lithography 软x
soft x ray projection lithography 软x射线投影光刻
laser projection lithography 激光投影光刻
For the requirement of laser projection lithography system, we designed laser projection lithography system based on video image alignment system.
针对目前我们研究的激光投影光刻机对高分辨力和高衬度的需要,设计了一套基于视频图像对准原理的激光投影光刻对准系统。
参考来源 - PCB曝光机的视频共焦显微镜对准系统研究·2,447,543篇论文数据，部分数据来源于NoteExpress
The principle and control algorithm of temperature compensation for Sub Micron projection lithography objectives are introduced.
主要介绍一种光刻机投影物镜温度补偿控制的原理及控制算法。
The large field projection lithography lens is a special optical lenses form, which put an high demands on the design and processing both for mechanical and optical.
大视场投影光刻物镜是光学系统中的一种特殊的形式，其设计加工要求高。
The calculative method of the large field projection lithography lens is presented, and on the distortion measuring setup which is accomplished, distortion measurement of 8 inch wafer is completed.
提出了针对大视场投影光刻物镜畸变的计算方法，并在完成的畸变特性测量装置上进行了8英寸的硅片测量。
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