The specific parameters of main optical system are deduced from the requirement of pattern transfer for the projection aligner. The limit of these parameters is discussed.
本文从投影光刻机的图形传递要求出发，导出投影光刻机各主要光学系统的具体要求，并讨论这些参数确定的局限性。
The calculation formula of extreme distance and limit interval to draw curves by straight lines on projection plane is deduced.
推导了投影平面上以直代曲的极限距离计算公式，代曲极限间隔值的探求。
Based on limit equilibrium method and stereographic projection method, the stability of the deep layer slide and the superficial layer slide can be analyzed.
利用极限平衡法对边坡整体深层破坏模式进行分析，对岩体局部不稳定块体，利用常用的地质分析方法赤平投影法简要进行分析；
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