The substrate is placed into a process chamber.

基板置于处理腔内。

youdao

The system includes a process chamber housing workpieces to be processed;

装入待 处理工件的处理室；

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Embodiments of the present invention are directed to a gas distribution system which distributes the gas more uniformly into a process chamber.

本发明的实施例关于一种气体分配系统，其可将气体均匀地分配至制程处理室。

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A key question is whether either chamber of Congress will employ what is called the "reconciliation process" aimed at overcoming filibusters,or blocks, in the Senate on contentious measures where a 60-vote majority is usually required to pass major legislation.

VOA: standard.2009.03.24

Legislators from the House of Representatives and the Senate this week continued the erratic process of reconciling versions of bills passed by each chamber.

ECONOMIST: The Volcker rule

In the chamber, that sounded too much like a process issue, with little direct relevance to the matter under discussion.

BBC: 'Playing the man, not the ball'

Mr Thompson said this was the "start of a process" and the Standards Committee would come back to the chamber to discuss the issue of committees in the future.

BBC: Parliamentary reform debate 2