Progresses in research on microstructure, electrical and optical properties and preparation technology of TCO thin films are reviewed.

综述了透明导电氧化物（TCO）薄膜的结构、光电性能以及TCO薄膜制备技术的研究进展。

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Several methods of the preparation of ITO thin film with sol-gel technique were introduced. The ITO thin films were gotten by the inorganic method.

介绍了几种用溶胶凝胶法制备ito薄膜的工艺方法，用其中一种无机的方法成功制备了ITO透明导电膜。

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The preparation and properties study of cubic boron nitride thin films are attractive and also very difficult to international scientific wold for recent years.

近几年来，立方氮化硼薄膜的制备和性质研究一直是国际上的研究热点之一，同时又是难点之一。

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