After analyzed the effect of preload voltage and sweep voltage on the negative electrostatic spring stiffness, a method to dissociate mechanical stiffness from the system stiffness has been provided.

通过分析预载电压和扫频信号幅值对静电负刚度的影响，提出了从系统刚度中分离出挠性梁机械刚度的计算方法。

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Then the mechanism of the preload of file , which can improve system efficiency effectively , is also designed. The law and the concrete implementation of the principles are discussed.

文中还设计了能有效提高系统效率的文件预装载机制，讨论了这一机制的原理和具体实现。

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Then the mechanism of the preload of file, which can improve system efficiency effectively, is also designed. The law and the concrete implementation of the principles...

文中还设计了能有效提高系统效率的文件预装载机制，讨论了这一机制的原理和具体实现。

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