The technology and preliminary test results of Si bi-dimension position sensitive detector based on multi-strip structure fabricated by using planar technology were described in this paper.

描述了用平面工艺技术研制基于硅多条的两维位置灵敏探测器的制各工艺技术及性能测试初步结果。

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As per discussion there is 72 preliminary die drawing as attached file . Please advise which are critical area and dimension that IEC have to pay special attention .

附件里面是先前的72种设计的草图。请告知IEC所特别关注的区域和尺寸！

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