... 永久电荷 permanent charge 优先吸附 preference adsorption 有机层 organic horizon ...
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soil preference adsorption 土壤优先吸附
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There are lots of particles adsorbed on wafer surface after CMP. Preference adsorption model was established according to the adsorption state.
CMP后大量颗粒吸附在芯片表面，根据颗粒在芯片表面的吸附状态，确立优先吸附模型。
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