Thus, studying methods and techniques to design a high precision scanning control system has practical sense.
因此，研究高精度扫描控制系统设计方法和技术具有重要的实际意义。
Thesystem is composed of a IR focusing Subsystem, a precision scanning six dimensions stage anda data acquisition module.
该系统由红外聚焦光学子系统、六维精密扫描工件台及数据采集子系统构成。
A high precision scanning and control system is an important part in modern scanning microsystem, which affects the quality of sample imaging for scanning microscope.
高精度扫描控制系统是现代扫描显微系统的重要组成部分，它影响着扫描显微镜对样品的扫描成像质量。
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