The design method of vibration can be used as the reference to ultra precision machine tool, supe...
此隔振设计方法对超精密机床、超微定位机构等超低传递率隔振设计有一定的参考价值。
Motion resolution in nanometer scale is the important characteristic indicator of ultra-precision machine tool.
纳米级分辨率的运动是当今超精密机床精度指标的特征标志。
Accurately position measuring of online measuring system is the key in developing of ultra-precision machine tool.
作为重点技术攻关项目,超精密机床的研制关键在于在线检测系统能否准确地定位测量。
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