Analysis on the microstructure shows that precipitation of compound containing titanium was found in the steel, and its amount increases with the elevation of annealing temperature.
显微组织分析表明,含钛钢中生成了钛化物相,并且随着退火温度的提高,钛化物析出量增多。
It is found that RTP is a rapid and effective way to dissolve oxygen precipitation in comparison with conventional furnace annealing.
实验发现,RTP是一种快速消融氧沉淀的有效方式,比常规炉退火消融氧沉淀更加显著。
The experimental results showed that high density of oxygen precipitation and induced-defects were formed after annealing of wafers at moderate and high temperatures.
重掺砷硅单晶在中高温退火时形成密度较高的氧沉淀及诱生缺陷。
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