Typically used in the transistor element called the gate, polysilicon has been part of the standard chip-manufacturing process for decades.
多晶硅常用在被称作门的晶体管元件中,已在标准的芯片制造工艺中使用了几十年。
Application of TMAH solutions which is used as etchant in boron etch-stop and anisotropic etching process in the manufacturing of single-crystal and polysilicon pressure sensors is mainly discussed.
介绍了四甲基氢氧化铵(TMAH)溶液的腐蚀特性,论述了在单晶硅和多晶硅高温压力传感器的制作过程中,TMAH腐蚀液在浓硼终止腐蚀和各向异性硅杯腐蚀两个制作工艺中的应用。
The technological conditions of polysilicon preparation has an important effect on the manufacturing process.
在研制器件过程中,多晶硅制备的工艺条件对其性能影响较大。
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