... polysilicon filling 多晶硅填充 polysilicon gate ccd 多晶硅栅电荷耦合装置 polysilicon gate process 多晶硅栅工艺 ...
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This paper briefly describes the structure and principle of newly developed linear-array buried-channel CCD (BCCD) with 3-phase, polysilicon overlay-gate, and, experimental results are presented.
本文对已研制成的线阵三相多晶硅交迭栅埋沟CCD (BCCD)摄象器件的结构、原理及实验、结果做一个简要的阐述。
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