A capacitive micro-acoustic sensor with a polysilicon film as diaphragm was designed in this paper.

设计了一种以多晶硅薄膜作为振动膜片的电容式硅微声传感器。

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The present invention discloses one kind of polysilicon film crystallization quality detecting device and detection and control method.

本发明公开一种多晶硅薄膜结晶品质的检测装置及其检测与控制方法。

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According to the theory and the experiment mentioned in this paper, the factors which effect the growth rate of polysilicon film have been analysed.

文章还从实验和理论上分析了影响多晶硅薄膜生长速率的因素。

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Thin film cells while cheaper are generally less efficient than polysilicon cells but have lower production costs, making them more attractive from a financial perspective.

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Solyndra, which was founded in 2005, invented a type of cylindrical solar module that was printed with thin-film photovoltaic cells that used little of the then-expensive polysilicon that forms the heart of conventional solar modules.

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