Based on the theory of electron current collected by probe, that the maximum derivative of electron current with respect to probe potential corresponds with the plasma potential is presented.
根据探针收集电子流的理论，提出电子流对探针电位的一次微商的最大值对应着等离子体电位。
A microwave resonator probe method for diagnosing local plasma electron density is described, and the measurement principle, design method and experiment results are included.
本文介绍了一种可以测量局部等离子体电子密度的微波共振探针法，并给出了它的测量原理、设计方法和实验结果。
The characteristic of spatial distribution of plasma ion density in reaction chamber were diagnosed by a Langmuir double probe, and the effect of Ar pressure and RF power were also investigated.
利用朗缪尔静电双探针诊断了蒸发镀膜装置反应室内等离子体密度及分析其分布规律，并分析了气压和功率对等离子体分布的影响。
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