The laser direct writing(LDW) system SVGLDW 04 with a projection optical system and a spatial light modulator(LCD-SLM) can expose a reduction pattern directly on a photoresist plate.
通过双远心成像光路，激光直写（LDW）系统SVG-LDW 04把液晶空间光调制器（LCD-SLM）上的光斑直接成像在光刻胶板上，得到高质量的光斑图形。
The SU-8 photoresist was performed energy minimization and MD simulation time after time until the system achieved equilibrium completely. And the elastic constants were analysed with analysis tool.
在高温高压下对SU - 8胶反复进行能量最小化和分子动力学模拟，直到体系达到完全的平衡后，分析体系的静态弹性常数。
The positive photoresist composition which is suitable for used in a resist coating method by a discharge nozzle system can be provided according to the invention.
根据本发明可提供能够适用于排出喷嘴式的抗蚀剂涂布法的正型光致抗蚀剂组合物。
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