photoetching technique [电子] 光刻技术
photoetching material [电子] 光刻材料
automatic projection photoetching machine 自动投影光刻机
dry photoetching technology 光刻干工艺
electronic beam photoetching 电子束光刻
photoetching cellulose film 光刻蚀纤维素软片
electron beam photoetching [电子] 电子束光刻
In addition, the method is compatible with the matured photoetching process, thereby reducing the cost and being beneficial to industrial production.
另外，本方法也与成熟的光刻工艺兼容，降低了成本，有利于工业生产。
Aligning method, aligning substrate, photoetching device and component manufacturing method.
对准方法，对准基底，光刻装置和器件制造方法。
It can be used in microelectronic processing, photoetching and scan microscopic focusing or imaging system.
广泛应用于微电子加工，光刻技术和扫描显微技术中的聚焦或成像系统中。
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