The dependence of phosphorous diffusion on the dwell time was researched by SRP and FPP after the samples were processed by RTP with different ambient, dwell time and temperatures.
利用SRP和FPP研究了不同气氛、时间和温度的RTP处理后样品中磷的扩散情况及扩散深度随时间变化的规律。
With increase of heating temperature and duration of heating time, the depth and concentration of phosphorous-enriched layer in uphill diffusion increases continuously.
随着提高加热温度和延长保温时间，“上坡扩散”的富磷层深度和浓度将不断增加。
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