高温磷扩散(Phosphorous Diffusion) 氧化矽蚀刻 (Oxide Etching)
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phosphorous diffusion source 磷扩散源
The dependence of phosphorous diffusion on the dwell time was researched by SRP and FPP after the samples were processed by RTP with different ambient, dwell time and temperatures.
利用SRP和FPP研究了不同气氛、时间和温度的RTP处理后样品中磷的扩散情况及扩散深度随时间变化的规律。
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