Phase shifting interferometry (PSI) is a high precise and sensitivity method in testing technology, especially in three-dimensions profile measurement.
移相干涉技术(PSI)是计量测试特别是三维形貌测量中高精度、高灵敏度的测量方法。
In this paper a new method of phase-stepping by changing the temperature of Laser Diode (LD) in phase Shifting Interferometry (PSI) has been presented.
提出利用改变半导体激光器温度来改变波长，在相移干涉仪中实现步进相移计量的新方法。
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