Laser Phase-shifting Interferometer 波面干涉仪
Optical phase-shifting interferometer 光学移相干涉仪
digital phase-shifting interferometer 数字波面干涉仪
white-light phase-shifting interferometer 白光相移干涉
the optical phase-shifting interferometer 光学移相干涉仪
phase-shifting point diffraction interferometer 移相式点衍射干涉仪
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The automatic test of Corner Cube Reflector (CCR), Roof Prism and Right-angle Prism is achieved by calculating the wavefront got from the digital phase-shifting interferometer.
本文通过对移相式数字波面干涉仪得到的测试波面进行处理实现锥体棱镜、屋脊棱镜和直角棱镜角度测试的数字化和自动化。
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