Mold structure, patterning method using the same, and method of fabricating liquid crystal display device.
模结构，利用该结构的构图方法，和制造液晶显示器的方法。
In the paper a kind of patterning method was studied with voltage applied between the AFM tip and sample with emphasis on its mechanism.
本文介绍了在AFM针尖与氢钝化硅表面之间施加电场作用对硅表面进行修饰的纳米加工方法，重点讨论了加工机理。
Applying the patterning method can manufacture a wider word line under the condition of maintaining an element density, avoid a short-channel effect and improve the efficiency of the element.
藉由本发明可以在维持元件密度的情况下制作较宽的字线，避免短沟道效应，提升元件的效能。
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