The distortion in pattern transfer may influence the functionality and performance of IC products and lower the production yield.
版图图形转移过程中的失真,将会影响最后产品的性能参数,并降低集成电路的成品率。
参考来源 - 亚波长光刻条件下集成电路可制造性设计与验证技术研究·2,447,543篇论文数据，部分数据来源于NoteExpress
The resolution of an etching process is a measure of the fidelity of pattern transfer.
刻蚀工艺的分辨率是图形转移保真度的量度。
The resolution of an etching process is a measure of the fidelity of pattern transfer .
刻蚀工艺的分辨率是图形转移保真度的量度。
Pattern transfer technique is used to transfer photoresist microlens arrays into the polymer underlayer.
通过反应离子刻蚀可以将光刻胶微透镜图形转移至这种高性能的聚合物材料上。
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