When the N_2O partial pressure ratio is 0.7, as-grown thin film has better c-axis preferential orientation, and an optimal p-type conduction, with a hole concentration of 6.04×10~(17) cm~(-3), a Hall mobility of 0.619 cm~2/Vs and a resistivity of 95.6Ωcm.
发现当N_2O分压比为0.7时,制备的Al-N共掺Zn_(0.95)Mg_(0.05)O薄膜具有最好的结晶质量,并且此时薄膜的导电类型显示为稳定的p型,空穴浓度和迁移率分别为6.04×10~(17)cm~(-3)、0.619 cm~2/Vs,电阻率为95.6Ωcm。
参考来源 - 不同N源制备Al·2,447,543篇论文数据,部分数据来源于NoteExpress
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