optical focus switch 光学聚焦转换开关 ; 光聚焦开关 ; 光学平面
optical focus system 光学聚焦系统
optical focus size 光学焦点尺寸
optical focus detection 光聚焦探测
Intraocular Optical Focus Adjustment 眼内光学焦点调整法
optical l focus switch 光学聚焦转换开关
The optical focus sensor includes a splitter configured to split the radiation beam into a first sub-beam and a second sub-beam.
光学聚焦传感器包括分束器，该分束器配置为将辐射光束分为第一子光束和第二子光束。
To detect whether a substrate is in a focal plane of an inspection apparatus, an optical focus sensor is arranged to receive a radiation beam via an objective lens.
为了探测衬底是否处在检查设备的焦平面上，一种光学聚焦传感器被布置为通过物镜接收辐射光束。
Spherical Aberration — causes light rays passing through a lens (or reflected from a mirror) at different distances from the optical center to come to focus at different points on the axis.
球差-使以不同孔径角穿过透镜(或从镜面上发射)的光线不能聚焦在轴上的同一点。
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