The design results show that on-axis and off-axis aberrations of the designed laser scanning lens are almost equal, and the image quality achieves the diffraction limit.
像质评价分析结果表明，所设计的镜头像质优良，轴上与轴外质量相当，像质达到衍射极限。
A new design of off-axis five mirrors optics was presented which was used to extreme-ultraviolet lithography. It was very suit for the commercialization at optical quality and free work distance.
本文探讨了一种可应用于极紫外光刻光学系统的离轴五反射镜系统，它在光学质量、自由工作距离方面满足了极紫外光刻商业化的要求。
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