The process of nonlinear distortion correction of orthogonal pattern group in E-beam scanning is introduced.
论述了电子束扫描正交图形簇产生畸变的非线性校正过程。
The method USES the model of radial nonlinear distortion with the symmetry of optical axis to obtain correction coefficients of the optical lens, and then corrects the distortion image.
该方法利用与光轴对称的径向畸变数学模型求出光学镜头的校正系数，对畸变图像进行校正。
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