The holograms were fabricated using a very finely focused ion beam to cut a pattern of extremely small slits just 20 nm across through a thin silicon membrane 30 nm thick.
全息图是用精细聚焦的离子束在一片30 n m厚的薄硅膜上切割出20nm长的极小的裂纹的图案组合而成的。
It will also use copper interconnects, low-k, strain silicon and other features. Like 32-nm, Intel will make use of 193-nm immersion lithography.
这款产品将使用Intel第三代HKMG工艺,第五代硅应变技术,另外与32nm类似,22nm制程仍将继续使用193nm液浸式光刻技术。
This is the second NAND flash device in production at the 20-nm class, joining a 64-Gbit 25-nm multi-layer cell NAND Flash from IM Flash Technologies, according to UBM TechInsights.
这是目前为止市面上第二款基于20nm级别制程的NAND闪存芯片产品,另外一款则是IM Flash生产的64Gbit密度的25nm制程产品。
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