That takes less energy than splitting nitrogen fluoride and there is no global warming risk, Pilgrim says.

这样能使能量消耗比使用三氟化氮时更少，而且没有促进全球变暖的危险，皮尔格林说。

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So after each layer is deposited, nitrogen fluoride is pumped into the chamber and is split to release highly reactive fluorine atoms that clean the walls.

所以在每层材料放置好之后，氮氟化物就被泵进工作舱中并分散开来，释放出高活性的氟原子来清洁墙壁。

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Must be treated to neutralise acids, precipitate dissolved metals, sulphide and fluoride and reduce nutrients such as phosphates and nitrogen.

沉淀溶解金属，硫化物和氟化物和减少像磷酸盐和氮之类的营养物。

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