Nikon Corp. has reported that some of its staff have been injured, and notes that it is continuing to gather information on the situation.
尼康公司日前报告说,它的一些工作人员受伤,并指出,它正继续收集有关情况。
The tool is reportedly being used for the development of Intel Corp.’s 22-nm logic node. With a different tool, Nikon was the sole lithography vendor for the critical layers at Intel’s 32-nm node.
据报道Intel正在使用这款光刻机开发其22nm节点制程逻辑芯片产品.目前尼康是Intel32nm制程芯片关键层制造用光刻设备的独家供应商。
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