Dishing problem of copper multilayer interconnection in ULSI was introduced, and the reasons and influencing factors were analyzed.
介绍了UL SI多层铜互连线中的碟形坑问题，对其产生的原因及影响因素进行了分析。
This paper introduces a ball-and-plate system developed in authors' laboratory. A fuzzy supervisory controller with multilayer control structure is designed aiming at the trajectory tracking problem.
本文介绍了研究室自主开发的板球系统实验平台，针对板球系统的轨迹控制问题设计了两层控制结构的监督模糊控制器。
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