The effect of solvent property on MRR of SAS is discussed.
讨论了溶液性质对SAS竞聚率的影响。
There is an optimal spindle servo feeding speed(SFS) at which the MRR is the highest.
存在一个较佳的主轴伺服进给速度使得工件的加工速度较高。
Currently, the slurries used in CMP usually contain particles at nano scale to accelerate the material remove ratio (MRR) and to optimize the planarity.
目前,CMP的抛光液通常使用纳米级颗粒来加速切除和优化抛光质量。
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