This article studies the influence of the container on the molecular free flying path and extends the concept of the free path.

本文分析了容器对分子自由飞行路程的影响，并拓展了自由程概念。

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Results show that the change of power affects ions' bombardment on the substrate, and that of pressure lead to the change of the mean free path of the molecular.

结果表明，射频功率的改变直接影响到离子对衬底的轰击效应，而反应气压的改变影响气体分子的平均自由程。

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