This article studies the influence of the container on the molecular free flying path and extends the concept of the free path.
本文分析了容器对分子自由飞行路程的影响，并拓展了自由程概念。
Results show that the change of power affects ions' bombardment on the substrate, and that of pressure lead to the change of the mean free path of the molecular.
结果表明，射频功率的改变直接影响到离子对衬底的轰击效应，而反应气压的改变影响气体分子的平均自由程。
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