new-style MOCVD reactor 新型MOCVD反应器
The system of MOCVD was designed, assembled and debugged. Mo substrate was heated in a cold-wall MOCVD reactor in order to heat it more centrally;
设计、组装、调试了MOCVD系统，采用冷壁加热方式，对基体实现选择性加热；
Because of the complicated transport process and invisible characteristics, domestic researchers have carried out few explorations on internal flow and temperature distribution of the MOCVD reactor.
由于制备薄膜的反应器中气体流动具有复杂和不可观测的特点，国内对MOCVD反应器内部流场和温度场的研究只处在起步阶段。
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