microwave plasma etching system
microwave plasma etching system
微波等离子体蚀刻系统
以上为机器翻译结果，长、整句建议使用 人工翻译 。
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Principles of microwave ECR plasma technology are introduced briefly. Present development of it'S research and applications in system manufacturing, CVD, PVD and etching is reviewed.
本文简要介绍了微波ECR等离子体技术的原理，评述了近年来这种技术在CVD、PVD、刻蚀等方面的研究和应用的进展。
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