A piezoelectric micropump based on MEMS technology is presented.

介绍了一种基于MEMS技术的压电微泵。

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The operating conditions for micropump and sample introduction system were optimized.

通过实验优化了微泵和试样引入系统的工作条件。

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We present the design and fabrication proc ess of a novel electro-magnetically actuated micropump.

主要阐述了一种新型电磁驱动微泵的设计和制作工艺。

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