The servo driver has been tested on the machining center, up to the accuracy of micron order.
该伺服驱动器在加工中心的实际应用中得到了微米级的加工精度。
Experiment result from imaging ellipsometry system demonstrates its availability and its precision reaches micron order.
该方法在椭偏成像系统的应用结果验证了其有效性，调焦精度达到微米量级。
When the characteristic size reach micron, submicron degree, overcoming the "limit" binding in order to increase the integration of device.
当特征尺寸进入到微米、亚微米量级时，需要克服“极限”束缚，增加器件的集成度。
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