The structure of serial bending arms for piezoelectric micromotors was designed, while the driving mechanism was analyzed.
首次设计了串联弯曲臂型压电微电机的结构，分析了结构特点以及驱动原理；
Electromagnetic planar micromotors were produced using AZ4903 with high depth-width ratios and thicknesses of the planar micromotors stator windings.
为满足电磁型平面微电机对定子绕组线圈的高深宽比及厚度要求，提出一种利用AZ 4903光刻胶制作电磁平面微电机定子绕组的方法。
应用推荐