Wet chemical etching of sacrificial layers plays an important part in fabricating movable tree-dimensional micromachines by combination with MEMS technologies.

牺牲层腐蚀技术结合MEMS技术是制作三维可动微机构的一个重要加工手段。

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There was buoyant talk of robots, fuzzy logic and micromachines, but no real action.

FORBES: Rational Exuberance

They are just beginning to know how to build the tools that would build the biological micromachines.

FORBES: Architect of Life

There is no escaping the fact that, ultimately, micromachines will have to have microengines to drive them.

ECONOMIST: Micromachines: The engines of Lilliput | The