micromachined gyroscope 微机械陀螺 Sensor and micromachined optical device technologies 传感器与微机械光器件技术 IMAGE MEASRUEMENT OF MICROMACHINED DEVICE‘...
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capacitive micromachined gyroscope 电容式微机械陀螺
Z-axis micromachined gyroscope Z轴微机械陀螺
Two-gimbals micromachined gyroscope 双框架微机械陀螺
angular vibratory micromachined gyroscope 微机械角振动陀螺仪
micromachined vibratory gyroscope 微机械振动陀螺仪
micromachined silicon gyroscope 硅微陀螺仪
Based on the dynamic equations of silicon micromachined gyroscope, the theoretical qudrature error was analyzed. The qudrature error arising from machining error is analyzed in detail by using the theory of stiffness matrix.
根据硅微机械陀螺仪的动力学方程式分析了原理性误差,并以刚度矩阵理论为基础详细分析了由加工引起的正交误差,结果表明由加工产生的正交误差远大于原理性正交误差。
参考来源 - 提高硅微陀螺仪性能若干关键技术研究·2,447,543篇论文数据，部分数据来源于NoteExpress
A realization method of the self-excitation drive circuit of the micromachined gyroscope with AGC function is presented.
提出了一种加入AGC功能的微机械陀螺自激驱动电路的实现方法。
The parameters of capacitive micromachined gyroscope structure were confirmed by theory research and emulation analysis.
电容式微机械陀螺仪是目前微机械传感器研究的重点。
An equivalent electrical analogue of vibrating micromachined gyroscope was derived from its dynamics model and simulated using EDA tools.
根据振动式微机械陀螺的动力学模型导出其等效的电学模型，并利用电路模拟工具对其进行了模拟。
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