Microgripper technique was one of important parts in micromachine techniques.

微夹钳技术是微机械技术的重要内容之一。

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A new type of zine oxide (ZnO) thin film devices can be realized utilizing piezoelectric and surface micromachine technology.

利用压电薄膜和表面微机械技术可实现新型的氧化锌簿膜器件。

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Some new techniques are adopted, for example, technology of dual-face alignmental silicon etching and anisotropic corrosion (micromachine), etc.

采用双面对准光刻工艺，各向异性腐蚀微机械加工制硅膜片等新技术。

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From the perspective of a patient, this is a Tricorder device, albeit one centered on an implantable micromachine sensor.

FORBES: Ingestible, Implantable, or Intimate contact; How Will You Take Your Micro-scale Body Sensors