The invention relates to a charge-super sensitive Coulomb meter and its preparation method that belongs to microelectronic device and micro-processing method.
本发明属于微电子器件和微加工方法，特别是涉及一种对电荷超敏感的库仑计及其制备方法。
In chemical enterprise, integrated circuit and microelectronic device are adopted for most of the instruments. However, the integrated circuit is subject to lightning and static electricity.
化工企业仪表发展趋势大多是采用集成电路，微处理设备，但集成电路抗雷击、静电能力十分脆弱。
The invention belongs to the technical field of a microelectronic device, and more particularly discloses an asymmetrical source-drain field effect transistor and a preparation method thereof.
本发明属于微电子器件技术领域，具体公开了一种不对称型源漏场效应晶体管及其制备方法。
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